1.

Conference Proceedings
Conference Proceedings
1. Process Modeling for Advanced Devices
Law, Mark E. ; Jones, Kevin S. ; Radic, Ljubo ; Crosby, Robert ; Clark, Mark ; Gable, Kevin ; Ross, Carrie
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.69-76,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
2.

Conference Proceedings
Conference Proceedings
2. Study Of The Effects Of A Two-Step Anneal On The End Of Range Defects In Silicon
Camillo-Castillo, Renata A. ; Jones, Kevin S. ; Law, Mark E. ; Rubin, Leonard M.
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.21-26,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717