1.

Conference Proceedings
Conference Proceedings
1. SELECTION OF TUBING FOR UHF GAS DELIVERY: MOISTURE ADSORPTION AND DESORPTION FROM TREATED STAINLESS STEELS
Johnson, A.D. ; Coronell, D.G. ; Zatko, D.A. ; Chen, M.S.K. ; Martinez de Pinillos, J.V.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III.  pp.406-417,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-9
2.

Conference Proceedings
Conference Proceedings
2. Dynamic Modelling of Moisture Transport and Surface Interactions in Ultrahigh-Purity Gas Delivery Systems
Coronell, D.G. ; Johnson, A.D. ; Chen, M.S.K.
Pub. info.: AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California.  1994.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1994