1.

Conference Proceedings
Conference Proceedings
1. Processing Effects and Electrical Evaluation of ZrO2 Formed by RTP Oxidation of Zr
Nieh, R. ; Qi, W-J. ; Lee, B.H. ; Kang, L. ; Jeon, Y. ; Onishi, K. ; Gopalan, S. ; Kang, C.S. ; Dhrarmarajan, E. ; Choi, R. ; Lee, J.C.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.214-221,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5
2.

Conference Proceedings
Conference Proceedings
2. Nitrogen (N2) Implantation to Suppress Growth of Interfacial Oxide in MOCVD BST and Sputtered BST Films
Nieh, R. ; Qi, W-J. ; Jeon, Y. ; Lee, B. H. ; Lucas, A. ; Kang, L. ; Lee, J. C. ; Gardner, M. ; Gilmer, M.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.521-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567