1.

Conference Proceedings
Conference Proceedings
1. Achieving sub-half-micron i-line manufacturability through automated OPC
Garza,M. ; Jackson,E. ; Shen,W.P. ; Eib,N.K. ; Sabouri,S. ; Hollerbach,U. ; Felmlee,T.L. ; Raghavan,V.N.V. ; Wang,K.C. ; Barouch,E. ; Orszag,S.A. ; Chao,K.K. ; Jensen,J.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.382-395,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
2.

Conference Proceedings
Conference Proceedings
2. Satellite ultraquiet isolation technology experiment(SUITE):electromechanical subsystems
Anderson,E.H. ; Evert,M.E. ; Glaese,R.M. ; Goodding,J.C. ; Pendleton,S.C. ; Camp,D. ; Fumo,J. ; Jessen,M. ; Cobb,R.G. ; Erwin,R.S. ; Jensen,J.
Pub. info.: Smart structures and materials 1999 : industrial and commercial applications of smart structures technologies : 2-4 March, 1999, Newport Beach, California.  pp.308-328,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3674
3.

Conference Proceedings
Conference Proceedings
3. Double-step process for manufacturing reticle to reduce gate CD variation
Kozuma,M. ; Komatsu,M. ; Arakawa,R. ; Kubo,S. ; Takahashi,T. ; Jensen,J. ; Bang,H.S. ; Lee,I.H. ; Shin,C. ; Kim,H.-S. ; Park,K.W.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.787-792,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186