Liu, S.T. ; Heikkila, W. ; Golke, K. ; Stinger, B. ; Flanery, M. ; Hurst, A. ; Panning, G. ; Kirchner, G. ; Jenkins, W.C.
Pub. info.:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.449-454, 2003. Pennington, N.J.. Electrochemical Society
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.333-338, 1994. Pennington, NJ. Electrochemical Society