1.

Conference Proceedings
Conference Proceedings
1. SURFACE CHEMICAL ROUTES TO LOW CONTAMINATION BEAM ASSISTED GaAs ETCHING
Marshall, Duncan ; Jackman, Richard B.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.587-592,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. CHEMICAL PRECURSORS FOR GaAs ETCHING WITH LOW ENERGY ION BEAMS: CHLORINE ADSORPTION ON GaAs(100)
Jackman, Richard B. ; Tyrrell, Glenn C. ; Marshall, Duncan ; French, Catherine L. ; Foord, John S.
Pub. info.: Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A..  pp.215-222,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 223
3.

Conference Proceedings
Conference Proceedings
3. THE ROLE OF ION BEAM ASSISTED SURFACE CHEMISTRY IN ETCHING: ADSORPTION AND REACTIONS OF ALKYL HALIDES
Marshall, Duncan ; Jackman, Richard B.
Pub. info.: Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A..  pp.23-28,  1992.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 268