Jackman, Richard B. ; Tyrrell, Glenn C. ; Marshall, Duncan ; French, Catherine L. ; Foord, John S.
Pub. info.:
Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.. pp.215-222, 1991. Pittsburgh, Pa.. Materials Research Society
Jackman, Richard B. ; Chua, Lye Hing ; Foord, John S.
Pub. info.:
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.677-682, 1993. Pittsburgh, Pa.. Materials Research Society