1.

Conference Proceedings
Conference Proceedings
1. Mechanical quality factor of microcantilevers for mass sensing applications
J. Lu ; T. Ikehara ; Y. Zhang ; T. Mihara ; R. Maeda
Pub. info.: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia.  pp.68001Y-1-68001Y-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6800
2.

Conference Proceedings
Conference Proceedings
2. Novel MEMS-based thermometer with low power consumption for health-monitoring network application
Y. Zhang ; T. Ikehara ; J. Lu ; T. Kobayash ; T. Itoh
Pub. info.: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia.  pp.68001V-1-68001V-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6800