1.

Conference Proceedings
Conference Proceedings
1. Application of SPM interferometry in MEMS vibration measurement
C. Tang ; G. He ; C. Xu ; L. Zhao ; J. Hu
Pub. info.: Optical test and measurement technology and equipment.  3  pp.67235P-1-67235P-5,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6723
2.

Conference Proceedings
Conference Proceedings
2. Study on the methods for ensuring the precision of an x-ray microscope
L. Zhao ; D. Sun ; P. Liu ; J. Hu
Pub. info.: 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies.  2  pp.72822N-1-72822N-4,  2009.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7282