1.

Conference Proceedings
Conference Proceedings
1. Application of SPM interferometry in MEMS vibration measurement
C. Tang ; G. He ; C. Xu ; L. Zhao ; J. Hu
Pub. info.: Optical test and measurement technology and equipment.  3  pp.67235P-1-67235P-5,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6723
2.

Conference Proceedings
Conference Proceedings
2. SPM interferometer with large range for mirco-vibration measurement
M. Fu ; C. Tang ; G. He ; J. Hu ; L. Wang
Pub. info.: Optical test and measurement technology and equipment.  3  pp.67235V-1-67235V-6,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6723