1.

Conference Proceedings
Conference Proceedings
1. The flash memory battle: How low can we go?
E. van Setten ; O. Wismans ; K. Grim ; J. Finders ; M. Dusa
Pub. info.: Optical Microlithography XXI.  3  pp.69244I-1-69244I-14,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
2.

Conference Proceedings
Conference Proceedings
2. Characterizing the imaging performance of flash memory masks using AIMS
E. van Setten ; O. Wismans ; K. Grim ; J. Finders ; M. Duso
Pub. info.: EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany.  pp.67920K-1-67920K-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6792