1.

Conference Proceedings
Conference Proceedings
1. Lithography simulation system for total CD control from design to manufacturing
Kotani, T. ; Ichikawa, H. ; Kobayashi, S. ; Nojima, S. ; Izuha, K. ; Tanaka, S. ; Inoue, S.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.219-229,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
2.

Conference Proceedings
Conference Proceedings
2. Positron and Positronium Annihilation in Low-Dielectric-Constant Films Studied by a Pulsed Positron Beam
Suzuki, R. ; Ohdaira, T. ; Kobayashi, Y. ; Ito, K. ; Yu, R.S. ; Shioya, Y. ; Ichikawa, H. ; Hosomi, H. ; Ishikiriyama, K. ; Shirataki, H. ; Matsuno, S. ; Xu, J.
Pub. info.: Positron annihilation ICPA-13 : proceedings of the 13th International Conference on Positron Annihilation, Kyoto, Japan, September 2003.  pp.224-228,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 445-446
3.

Conference Proceedings
Conference Proceedings
3. Efficient hybrid optical proximity correction method based on the flow of design for manufacturability (DfM)
Kotani, T. ; Ichikawa, H. ; Urakami, T. ; Nojima, S. ; Kobayashi, S. ; Oikawa, Y. ; Tanaka, S. ; Ikeuchi, A. ; Suzuki, K. ; Inoue, S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.628-637,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
4.

Conference Proceedings
Conference Proceedings
4. Multilevel diffractive optical elements and femtosecond pulse shaping
Ichikawa, H. ; Fukuoka, K.
Pub. info.: 19th Congress of the International Commission for Optics: Optics for the Quality of Life.  pp.466-467,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4829
5.

Conference Proceedings
Conference Proceedings
5. Improvement of pattern collapse issue by additive-added D.I. water rinse process
Tanaka, K. ; Naito, R. ; Kitada, T. ; Kiba, Y. ; Yamada, Y. ; Kobayashi, M. ; Ichikawa, H.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1366-1381,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
6.

Conference Proceedings
Conference Proceedings
6. Advanced hybrid optical proximity correction system with OPC segment library and model-based correction module
Kotani, T. ; Kobayashi, S. ; Ichikawa, H. ; Tanaka, S. ; Watanabe, S. ; Inoue, S.
Pub. info.: Optical Microlithography XV.  Part One  pp.188-195,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691