1.

Conference Proceedings
Conference Proceedings
1. Printability of quartz defects in a production Cr-Iess mask process [6154-161]
Hughes, G. ; MacDonald, S. ; Riddick, J. ; Nhiev, A ; Hickethier, J.
Pub. info.: Optical Microlithography XIX.  pp.615446-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. Design and fabrication of highly complex topographic nano-imprint template for dual Damascene full 3-D imprinting [5992-88]
MacDonald, S. ; Hughes, G. ; Stewart, M. ; Palmieri, F. ; Willson, C. G.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59922F-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992