ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China. pp.60320S-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Applications of digital image processing XXVII : 2-6 August 2004, Denver, Colorado, USA. pp.696-701, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Zhang, Z. ; Wen, Z. ; Xu, S. ; Li, K. ; Zhang, Z. ; Huang, S.
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Micromachining and Microfabrication Process Technology and Devices. pp.434-438, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering