1.

Conference Proceedings

Conference Proceedings
Wen, Z. ; Chen, G. ; Huang, S.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.159-166,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983
2.

Conference Proceedings

Conference Proceedings
Zhang, Z. ; Wen, Z. ; Xu, S. ; Li, K. ; Zhang, Z. ; Huang, S.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.434-438,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601