1.

Conference Proceedings

Conference Proceedings
Zhang, J. ; Fu, H. ; Zhu, Y. ; Chen, W. ; Huang, S.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.283-288,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641
2.

Conference Proceedings

Conference Proceedings
Zhang, J. ; Fu, H. ; Huang, S. ; Wu, Y.
Pub. info.: MEMS/MOEMS Components and Their Applications II.  pp.204-210,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5717