1.

Conference Proceedings

Conference Proceedings
Qiu, Y. ; Chen, B. ; Liu, M. ; Xu, Q. ; Xue, L. ; Ren, L. ; Hu, Y. ; Long, S. ; Lu, J. ; Kong, X. ; Li, L. ; Li, J. ; Tang, Y.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.353-364,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
2.

Conference Proceedings

Conference Proceedings
Zheng, J. ; Liu, J. ; Tang, Y. ; Hu, Y.
Pub. info.: High-Power Lasers and Applications III.  pp.147-153,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5627