1.
|
Conference Proceedings
|
Qiu, Y. ; Chen, B. ; Liu, M. ; Xu, Q. ; Xue, L. ; Ren, L. ; Hu, Y. ; Long, S. ; Lu, J. ; Kong, X. ; Li, L. ; Li, J. ; Tang, Y.
Pub. info.: |
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China. pp.353-364, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5645 |
|
2.
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Conference Proceedings
|
Zheng, J. ; Liu, J. ; Tang, Y. ; Hu, Y.
Pub. info.: |
High-Power Lasers and Applications III. pp.147-153, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5627 |
|