1.
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Conference Proceedings
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Berger, L. ; Dress, P. ; Gairing, T. ; Chen, J.J. ; Hsieh, R.-G. ; Lee, H.-C. ; Hsieh, H.-C.
Pub. info.: |
23rd Annual BACUS Symposium on Photomask Technology. pp.380-391, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5256 |
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2.
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Conference Proceedings
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Chen, C.-J. ; Lee, H.-C. ; Lu, C.-L. ; Hsieh, R.-G. ; Chen, W.-C. ; Hsieh, H.-C. ; Lin, B.-J.
Pub. info.: |
23rd Annual BACUS Symposium on Photomask Technology. pp.673-683, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5256 |
|
3.
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Conference Proceedings
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Chang, S.-M. ; Chin, C.C. ; Wang, W.-C. ; Lu, C.-L. ; Hsieh, R.-G. ; Tsay, C.-S. ; Yen, Y.-S. ; Chin, S.-C. ; Lee, H.-C. ; Liu, R.-G. ; Chen, K.-S. ; Hsieh, H.-C. ; Ku, Y.C. ; Lin, J.C.
Pub. info.: |
23rd Annual BACUS Symposium on Photomask Technology. pp.1065-1071, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5256 |
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