1.

Conference Proceedings
Conference Proceedings
1. ULTRA-SMOOTH DRY ETCHING OF GaAs USING A HYDROGEN PLASMA PRETREATMENT
Shul, R. J. ; Choquette, Kent D. ; Howard, A. J. ; Rieger, D. J. ; DiRubio, C. A. ; Freund, R. S. ; Wetzel, R. C.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.465-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
2.

Conference Proceedings
Conference Proceedings
2. High Rate Dry Etching of GaN, AIN and InN in ECR Cl2/CH4/H2/Ar Plasmas
Vartuli, C. B. ; Pearton, S. J. ; Abernathy, C. R. ; Shul, R. J. ; Kilcoyne, S. P. ; Crawford, M. Hagerott ; Howard, A. J. ; Parmeter, J. E.
Pub. info.: Materials - fabrication and patterning at the nanoscale : Symposium held April 19-20, 1995, San Francisco, California, USA.  pp.37-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 380
3.

Conference Proceedings
Conference Proceedings
3. Plasma Chemistry Dependent ECR Etching of GaN
Shul, R. J. ; Ashby, C. I. H. ; Rieger, D. J. ; Howard, A. J. ; Pearton, S. J. ; Abernathy, C. R. ; Vartuli, C. B. ; Barnes, P. A. ; Davis, P.
Pub. info.: Gallium nitride and related materials : the First International Symposium on Gallium Nitride and Related Materials held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.751-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 395
4.

Conference Proceedings
Conference Proceedings
4. ECR PLASMA SYNTHESIS OF SILICON NITRIDE FILMS ON GaAs AND InSb
Barbour, J. C. ; Lovejoy, M. L. ; Ashby, C. I. H. ; Howard, A. J. ; Custer, J. S. ; Shul, R. J.
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.899-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316