Kunz, R. R. ; Ehrlich, D. J. ; Melngailis, J. ; Horn, M. W.
Pub. info.:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.105-110, 1992. Pittsburgh, Pa.. Materials Research Society