1.

Conference Proceedings
Conference Proceedings
1. Automated fault detection and classification of etch systems using modular neural networks
Hong, S.J. ; May, G.S. ; Yamartino, J. ; Skumanich, A.
Pub. info.: Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA.  pp.134-141,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5378
2.

Conference Proceedings
Conference Proceedings
2. Neural network based time series modeling of optical emission spectroscopy data for fault detection in reactive ion etching
Hong, S.J. ; May, G.S.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.1-8,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041