1.
|
Conference Proceedings
|
Hong, S. ; Nishibe, T. ; Okayasu, T. ; Takahashi, K. ; Takano, Y. ; Kang, W. ; Tanaka, H.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.285-293, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
2.
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Conference Proceedings
|
Hong, S. ; Takano, Y. ; Kanda, T. ; Kudo, T. ; Padmanaban, M. ; Tanaka, H. ; Lee, S.-H. ; Lee, J.-H. ; Woo, S.-G.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.195-206, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|