Morikawa, Y. ; Kokubo, H. ; Nishiguchi, M. ; Nara, M. ; Totsu, Y. ; Hoga, M. ; Hayashi, N.
Pub. info.:
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.224-234, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Morikawa, Y. ; Totsu, Y. ; Nishiguchi, M. ; Hoga, M. ; Hayashi, N. ; Pang, L. ; Luk-Pat, G.T.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.922-934, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Mesuda, K. ; Toyama, N. ; Narukawa, S. ; Morikawa, Y. ; Mohri, H. ; Hayashi, N. ; Hoga, M.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology IX. pp.396-409, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Nishiguchi, M. ; Morikawa, Y. ; Motonaga, T. ; Noguchi, K. ; Sasaki, S. ; Mohri, S.H. ; Hoga, M. ; Hayashi, N.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.955-963, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Aritsuka, Y. ; Kitada, M. ; Kurosawa, M. ; Takikawa, T. ; Fujita, H. ; Sano, H. ; Hoga, M. ; Hayashi, N.
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Photomask and Next-Generation Lithography Mask Technology XI. pp.941-949, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Kuriyama, K. ; Suzuki, T. ; Narukawa, S. ; Mohri, H. ; Hoga, M. ; Hayashi, N.
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Photomask and Next-Generation Lithography Mask Technology XIII. pp.62832O-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Fujii, A. ; Sasaki, S. ; Shimizu, M. ; Kobayashi, Y. ; Tominaga, T. ; Hoga, M. ; Mohri, H. ; Hayashi, N. ; Hayano, K. ; Hasegawa, N. ; Hosono, K. ; Arai, T.
Pub. info.:
24th Annual BACUS Symposium on Photomask Technology. pp.960-967, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering