Feygelson, T.I. ; Hobart, K.D. ; Ancona, M. ; Kub, F.J. ; Butler, J.E.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.439-449, 2005. Pennington, NJ. Electrochemical Society
Kub, F.J. ; Hobart, K.D. ; Ancona, M. ; Neilson, J.M. ; Brandmier, K. ; Waind, P.R.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.242-242, 2001. Pennington, NJ. Electrochemical Society