1.

Conference Proceedings
Conference Proceedings
1. Microscopic beam profile and its relationship with the poly-Si film morphology grown laterally by a phase-modulated excimer-laser crystallization method
Kimura, Y. ; Jyumonji, M. ; Hiramatsu, M. ; Nishitani, M. ; Malsumura, M.
Pub. info.: Thin Film Transistor Technologies VI : proceedings of the international symposium.  pp.82-89,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-23
2.

Conference Proceedings
Conference Proceedings
2. Mechanism of Oxygen Contamination in PECVD a-Si:H Films
Hiramatsu, M. ; Kimura, Y. ; Jywnonji, M. ; Nishitani, M. ; Matsumura, M.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.701-707,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8