1.

Conference Proceedings
Conference Proceedings
1. PE-CVD of F-Doped SiO2 Thin Films Using Tetraisocyanatesilane and Tetrafluorosilane
Shirafuji, T. ; Sawada, M. ; Nakagami, Y. ; Hayashi, Y. ; Nishino, S.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.137-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443
2.

Conference Proceedings
Conference Proceedings
2. PECVD of Fluorocarbon/Silicon Oxide Composite Thin Films From TFE and HMDSO
Shirafuji, T. ; Hayashi, Y. ; Nishino, S.
Pub. info.: Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A..  pp.173-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 544