1.

Conference Proceedings
Conference Proceedings
1. PE-CVD of F-Doped SiO2 Thin Films Using Tetraisocyanatesilane and Tetrafluorosilane
Shirafuji, T. ; Sawada, M. ; Nakagami, Y. ; Hayashi, Y. ; Nishino, S.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.137-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443
2.

Conference Proceedings
Conference Proceedings
2. PECVD of Fluorocarbon/Silicon Oxide Composite Thin Films From TFE and HMDSO
Shirafuji, T. ; Hayashi, Y. ; Nishino, S.
Pub. info.: Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A..  pp.173-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 544
3.

Conference Proceedings
Conference Proceedings
3. Microfabrication of Si Column Covered with SiC Film for Electron Emitter
Nakata, T. ; Ohshiro, Y. ; Shoji, A. ; Okui, Y. ; Ohshima, S. ; Hayashi, Y. ; Nishino, S.
Pub. info.: Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy.  pp.237-240,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 483-485