Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.168-177, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.376-387, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.328-335, 1997. Bellingham. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India. pp.233-238, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1997 : Smart sensing, processing, and instrumentation : 3-5 March 1997, San Diego, California. pp.344-351, 1997. Bellingham. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.148-155, 1997. Bellingham. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California. pp.278-286, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India. pp.280-286, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas. pp.25-30, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.280-287, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering