Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.168-177, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California. pp.278-286, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering