1.

Conference Proceedings
Conference Proceedings
1. Toward the ultimate storage device: the fabrication of an ultrahigh-density memory device with 193-nm lithography
Cirelli, R. A. ; Bude, J. ; Mansfield, W. M. ; Timp, G. L. ; Klemens, F. P. ; Watson, C. P. ; Weber, G. R. ; Sweeney, J R. ; Houlihan, F. M. ; Gabor, A. H. ; Baumann, F. ; Buonanno, M. ; Forsyth, G. F. ; Barr, D. ; Lee, T. C. ; Rafferty, C. S. ; Hutton, R. S. ; Timko, A. G. ; Hergenrother, J. ; Reichmanis, E. ; Harriott, L. R. ; Hillenius, S. J. ; Nalamasu, O.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.295-305,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
2.

Conference Proceedings
Conference Proceedings
2. *HIGH QUALITY EPITAXIAL GROWTH ON IN-SITU PATTERNED InP SUBSTRATE
Temkin, H. ; Harriott, L. R. ; Weiner, J. ; Hamm, R. A. ; Panish, M. B.
Pub. info.: III-V heterostructures for electronic/photonic devices : symposium held April 24-27, 1989, San Diego, California, U.S.A..  pp.39-46,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 145
3.

Conference Proceedings
Conference Proceedings
3. TEMPERATURE DEPENDENCE OF MORPHOLOGY OF InP FILMS GROWN BY METALORGANIC MOLECULAR BEAM EPITAXY
Cotta, M. A. ; Hamm, R. A. ; Chu, S. N. G. ; Harriott, L. R. ; Temkin, H.
Pub. info.: Mechanisms of thin film evolution.  pp.123-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 317
4.

Conference Proceedings
Conference Proceedings
4. Selective area epitaxy for optoelectronic devices
Temkin, H. ; Hamm, R. A. ; Feygenson, A. ; Cotta, M. A. ; Harriott, L. R. ; Ritter, D. ; Wang, Y. L.
Pub. info.: III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A..  pp.89-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 300
5.

Conference Proceedings
Conference Proceedings
5. FOCUSED ION BEAMS SIMS FOR MICROMACHINING APPLICATIONS
Harriott, L. R. ; Vasile, M. J.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.483-486,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
6.

Conference Proceedings
Conference Proceedings
6. EVOLUTION OF ROUGHNESS ON InP LAYERS OBSERVED BY SCANNING FORCE MICROSCOPY
Cotta, M. A. ; Hamm, R. A. ; Chu, S. N. G. ; Staley, T. W. ; Harriott, L. R. ; Panish, M. B. ; Temkin, H.
Pub. info.: Common themes and mechanisms of epitaxial growth : symposium held April 13-15, 1993, San Francisco, California, U.S.A..  pp.23-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 312