Harashima, N. ; Sasaki, T. ; Kuwahara, K. ; Hayashi, T. ; Tanaka, Y. ; Yoshioka, N. ; Hara, M. ; Ohkubo, Y.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology X. pp.275-280, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering