1.

Conference Proceedings
Conference Proceedings
1. Resist blur and line edge roughness (Invited Paper)
Zhang, G. ; Terry, M. ; O'Brien, S. ; Soper, R. ; Mason, M. ; Kim, W. ; Wang, C. ; Hansen, S. ; Lee, J. ; Ganeshan, J.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.38-52,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. YBa2Cu3O6 - A selective ammoxidation catalyst
Otamiri, J. C. ; Andersson, A. ; Hansen, S. ; Bovin, J. -O.
Pub. info.: New developments in selective oxidation : proceedings of an international symposium, Rimini, Italy, September 18-22, 1989.  pp.275-,  1990.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 55
3.

Conference Proceedings
Conference Proceedings
3. Precipitation Strengthening in a Low Carbon Nb-Microalloyed Steel
Bai, D.Q. ; Hamad, F. ; Asante, J. ; Hansen, S.
Pub. info.: Microalloying for new steel processes and applications : proceedings of the International Conference on Microalloying for New Steel Processes and Applications 7th-9th September 2005, Donostia-San Bebastián, Basque Country, Spain.  pp.481-488,  2005.  Zurich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 500-501
4.

Conference Proceedings
Conference Proceedings
4. Aggregation And Cluster Size Evolution In Non-homogeneous Flows
Hansen, S. ; Ottino, J.
Pub. info.: AIChE ANNUAL MEETING - NOVEMBER 10-15, 1996 - CHICAGO, IL.  1996.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1996
5.

Conference Proceedings
Conference Proceedings
5. Formation of Active Phases in the Sb-V-, Al-Sb-V-, and Al-Sb-V-W-Oxide Systems for Propane Ammoxidation
Nilsson, J. ; Landa-Canovas, A. R. ; Hansen, S. ; Andersson, A.
Pub. info.: 3rd World Congress on Oxidation Catalysis : proceedings of the 3rd World Congress on Oxidation Catalysis, San Diego, CA, U.S.A., 21-26 September 1997.  pp.413-,  1997.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 110
6.

Conference Proceedings
Conference Proceedings
6. Ammoxidation of propane over vanadium-antimony-oxide catalysts. Role of phase cooperation effects
Nilsson, R. ; Lindblad, T. ; Andersson, A. ; Song, C. ; Hansen, S.
Pub. info.: New developments in selective oxidation II : proceedings of the second world congress and fourth European workshop meeting, Benalmádena, Spain, September 20-24, 1993.  pp.293-,  1994.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 82
7.

Conference Proceedings
Conference Proceedings
7. Structure-activity relationships in the oxidation of alkylaromatics over metal oxides
Andersson, A. ; Hansen, S. ; Sanati, M.
Pub. info.: Structure-activity and selectivity relationships in heterogeneous catalysis : proceedings of the ACS Symposium on Structure-Activity Relationships in Heterogeneous Catalysis, Boston, MA, April 22-27, 1990.  pp.43-56,  1991.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 67
8.

Conference Proceedings
Conference Proceedings
8. Mechanisms of Low-Temperature Wafer Bending
Reiche, M. ; Radu, I. ; Gabriel, M. ; Zoberbier, M. ; Hansen, S. ; Eichler, M.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.326-337,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-02
9.

Conference Proceedings
Conference Proceedings
9. Capabilities of an Ambient Pressure Plasma for Activation in LT Wafer Bonding Processes
Gabriel, M. ; Cetin, V. ; Hansen, S. ; Reiche, M. ; Radu, I. ; Eichler, M.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.50-57,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-02
10.

Conference Proceedings
Conference Proceedings
10. Precision process calibration and CD predictions for low-k1 lithography [5853-64]
Chen, T. ; Park, S. ; Berger, G. ; Coskun, T. H. ; de Vocht, J. ; Chen, F. ; Yu, L. ; Hsu, S. ; van den Broeke, D. ; Socha, R. ; Park, J. ; Gronlund, K. ; Davis, T. ; Plachecki, V. ; Harris, T. ; Hansen, S. ; Lambson, C.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.785-799,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
11.

Conference Proceedings
Conference Proceedings
11. Enabling the 45nm node by hyper-NA polarized lithography [6154-11]
De Boeij, W. ; Swinkels, G ; Le Masson, N. ; Koolen, A. ; Van Greevembroek, H. ; Klaassen, M. ; Van de Kerkhof, M. ; Van Ingen Schenau, K. ; De Winter, L. ; Wehrens, M. ; Hansen, S. ; Wagner, C.
Pub. info.: Optical Microlithography XIX.  pp.61540B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
12.

Conference Proceedings
Conference Proceedings
12. The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging [5992-37]
Geh, B. ; Flagello, D. G. ; Pregler, C. ; Martin, P. M. ; Leunissen, L. H. A. ; Hansen, S. ; de Boeij, W.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599210-599210,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
13.

Conference Proceedings
Conference Proceedings
13. Predictive modeling of advanced illumination pupils used as imaging enhancement for low-k1 applications
Heil, T. ; Graupner, P. ; Garreis, R. ; Egger, R. ; Brotsack, M. ; Finders, J. ; Hansen, S.
Pub. info.: Optical Microlithography XVII.  pp.344-356,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
14.

Conference Proceedings
Conference Proceedings
14. Illumination source mapping and optimization with resist-based process metrics for low-k1 imaging
Zhang, G. ; Hansen, S.
Pub. info.: Optical Microlithography XVII.  pp.369-380,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
15.

Conference Proceedings
Conference Proceedings
15. Characterization of ACLV for advanced technology nodes using scatterometer-based lens fingerprinting technique
Wang, C.A. ; Zhang, G. ; DeMoor, S. ; Tan, C. ; Ilzhoefer, J. ; Atkinson, C. ; Wickman, C. ; Hansen, S. ; Geh, B. ; Flagello, D.G. ; Boehm, M.
Pub. info.: Optical Microlithography XVII.  pp.581-590,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
16.

Conference Proceedings
Conference Proceedings
16. Optical lithography in the sub-50-nm regime
Flagello, D.G. ; Arnold, B. ; Hansen, S. ; Dusa, M. ; Socha, R.J. ; Mulkens, J. ; Garreis, R.
Pub. info.: Optical Microlithography XVII.  pp.21-33,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377