1.
Conference Proceedings |
Zhang, G. ; Terry, M. ; O'Brien, S. ; Soper, R. ; Mason, M. ; Kim, W. ; Wang, C. ; Hansen, S. ; Lee, J. ; Ganeshan, J.
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2.
Conference Proceedings |
2. Illumination source mapping and optimization with resist-based process metrics for low-k1 imaging
Zhang, G. ; Hansen, S.
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3.
Conference Proceedings |
Wang, C.A. ; Zhang, G. ; DeMoor, S. ; Tan, C. ; Ilzhoefer, J. ; Atkinson, C. ; Wickman, C. ; Hansen, S. ; Geh, B. ; Flagello, D.G. ; Boehm, M.
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