Reiche, M. ; Radu, I. ; Gabriel, M. ; Zoberbier, M. ; Hansen, S. ; Eichler, M.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.326-337, 2005. Pennington, NJ. Electrochemical Society
Gabriel, M. ; Cetin, V. ; Hansen, S. ; Reiche, M. ; Radu, I. ; Eichler, M.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.50-57, 2005. Pennington, NJ. Electrochemical Society