1.
|
Conference Proceedings
|
Hanf, M. ; Schaporin, A.V. ; Hahn, R. ; Dotzel, W. ; Gessner, T.
Pub. info.: |
MEMS/MOEMS Components and Their Applications II. pp.117-126, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5717 |
|
2.
|
Conference Proceedings
|
Kurth, S. ; Kaufmann, C. ; Hahn, R. ; Mehner, J. ; Dotzel, W. ; Gessner, T.
Pub. info.: |
MOEMS Display and Imaging Systems III. pp.23-33, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5721 |
|