1.

Conference Proceedings
Conference Proceedings
1. INFLUENCE OF COOLING CONDITION DURING CRYSTAL GROWTH OF CZ-Si ON OXIDE BREAKDOWN PROPERTY
Iwasaki, T. ; Tsumori, Y. ; Nakai, K. ; Haga, H. ; Kojima, K. ; Nakashizu, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.744-755,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. The Formation of Defects Degrading Gate Oxide Integrity During CZ-Si Crystal Growth
Tsumori, Y. ; Nakai, K. ; Iwasaki, T. ; Haga, H. ; Kojima, K. ; Nakashizu, T.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.23-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378