1.

Conference Proceedings
Conference Proceedings
1. TEMPERATURE DEPENDENCE OF ETCH RATE AND RESIDUAL DAMAGE IN REACTIVELY ION ETCHED GaAs AND A1GaAs
Pearton, S.J. ; Jones, K.S. ; Chakabarti, U.K. ; Emerson, B. ; Lane, E. ; Vasile, M.J. ; Fullowan, T.R. ; Hobson, W.S. ; Short, K.T. ; Haegel, N.M.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.489-494,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
2.

Conference Proceedings
Conference Proceedings
2. ION IMPLANT ACTIVATION AND REDISTRIBUTION IN AlXGa1-XAs
Pearton, S.J. ; Hobson, W.S. ; Von Neida, A.E. ; Haegel, N.M. ; Jones, K.S. ; Morris, N. ; Sealy, B.J.
Pub. info.: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.665-670,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 157