1.

Conference Proceedings
Conference Proceedings
1. The APC (Advanced Process Control) procedure for process window and CDU improvement using DBMs
J. Kim ; T. Lee ; A. Jung ; G. Yoo ; H. Yang
Pub. info.: Lithography Asia 2008.  2  pp.71403G-1-71403G-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
2.

Conference Proceedings
Conference Proceedings
2. Wide applications of design based metrology with tool integration
H. Yang ; J. Kim ; A. Jung ; T. Lee ; D. Yim
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.692239-1-692239-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922