1.

Conference Proceedings
Conference Proceedings
1. Resolution enhancement techniques for contact hole printing of sub-50nm memory device
H. Shin ; T. You ; M. Yoo ; J. Choi ; K. Yang
Pub. info.: Lithography Asia 2008.  2  pp.714034-1-714034-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
2.

Conference Proceedings
Conference Proceedings
2. The analysis of optical lithography at 2-dimensional dense structure
C. Park ; T.-S. Eom ; H. Shin ; K. Yang ; J. Choi
Pub. info.: Optical Microlithography XXI.  3  pp.69244V-1-69244V-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924