1.

Conference Proceedings
Conference Proceedings
1. 3D Raman Spectroscopy Investigation of Defects in 4H-SiC Epilayer
K. Hara ; M. Naito ; H. Fujibayashi ; A. Akiba ; Y. Takeuchi
Pub. info.: Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France.  pp.339-342,  2015.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 821-823
2.

Conference Proceedings
Conference Proceedings
2. 150mm Silicon Carbide Selective Embedded Epitaxial Growth Technology by CVD
K. Hara ; H. Fujibayashi ; Y. Takeuchi ; S. Omae
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.43-46,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897