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Conference Proceedings

1. Spectroellipsometric study of optical and electrical properties of buried CoSi2 layers in silicon produced by MEYVA implantation

Guo,W. ; Wong,S. ; Zhu,Z.

Pub. info.:	Automated optical inspection for industry: theory, technology, and applications II : 16-19 September, 1998, Beijing, China. pp.561-570, 1998. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3558

Conference Proceedings

2. Spectroellipsometric study of SiC/Si heterostructures produced by MEVVA implantation

Guo,W. ; Zhu,Z. ; Wong,S.

Pub. info.:	Automated optical inspection for industry: theory, technology, and applications II : 16-19 September, 1998, Beijing, China. pp.578-586, 1998. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3558

Conference Proceedings

3. Spectroellipsometric study of diamondlike carbon films

Guo,W. ; Wong,S. ; Zhu,Z.

Pub. info.:	Automated optical inspection for industry: theory, technology, and applications II : 16-19 September, 1998, Beijing, China. pp.571-577, 1998. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3558