1.

Conference Proceedings
Conference Proceedings
1. Fabrication of microlenses by combining silicon technology,mechanical micromachining and plastic molding
Kohler,U. ; Guber,A.E. ; Bier,W. ; Heckele,M. ; Schaller,Th.
Pub. info.: Miniaturized Systems with Micro-Optics and Micromechanics.  pp.18-22,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2687
2.

Conference Proceedings
Conference Proceedings
2. On-line exhaust gas analytics during plasma cleaning of PECVD facilities
Guber,A.E. ; Kohler,U.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing.  pp.147-155,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2637