1.

Conference Proceedings
Conference Proceedings
1. Novel technique for critical dimension measurements of phase-shift masks using broadband transmittance spectra in conjunction with RCWA [6349-162]
Gray, A. ; Lam, J. C. ; Chen, S.
Pub. info.: Photomask Technology 2006.  pp.634949-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings
Conference Proceedings
2. Optical measurements of critical dimensions at several stages of the mask fabrication process [6152-131]
Lam, J. C. ; Gray, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61523C-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
3.

Conference Proceedings
Conference Proceedings
3. Fast nondestructive optical measurements of critical dimension uniformity and linearity on AEI and ASI phase-shift masks [6349-61]
Gray, A. ; Lam, J. C.
Pub. info.: Photomask Technology 2006.  pp.63491O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349