Tao, Y. ; Yelon, A. ; Sacher, E. ; Lu, Z.H. ; Graham, M.J.
Pub. info.:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.293-298, 1992. Pittsburgh, Pa.. Materials Research Society
Lu, Z.H. ; Tao, Y. ; Yang, B.X. ; Feng, X.H. ; Mitchell, D.F. ; Yelon, A. ; Graham, M.J. ; Sacher, E.
Pub. info.:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.299-304, 1992. Pittsburgh, Pa.. Materials Research Society