1.

Conference Proceedings
Conference Proceedings
1. Resistance Decrease of Phosphorus Ion Implanted Poly-Si Thin Films during Low Temperature Annealing
Tokioka, H. ; Masutani, Y. ; Goto, Y. ; Nagao, S. ; Kurokawa, H.
Pub. info.: Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.405-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 403
2.

Conference Proceedings
Conference Proceedings
2. STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF UNDOPED POLY-Si OXIDES
Sakamoto, T. ; Tokioka, H. ; Takanabe, S. ; Kubota, T. ; Niwano, Y. ; Goto, Y. ; Namizaki, H. ; Wada, O. ; Kurokawa, H.
Pub. info.: Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.933-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 358