1.

Conference Proceedings
Conference Proceedings
1. KINETICS OF SILICON OXIDE THIN FILM DEPOSITION FROM SILANE AND DISILANE WITH NITROUS OXIDE
Chapple-Sokol, Jonathan D. ; Giunta, Carmen J. ; Gordon, Roy G.
Pub. info.: SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A..  pp.127-132,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 105
2.

Conference Proceedings
Conference Proceedings
2. KINETICS OF SILICON OXIDE THIN FILM DEPOSITION FROM SILANE AND DISILANE WITH NITROUS OXIDE
Chapple-Sokol, Jonathan D. ; Giunta, Carmen J. ; Gordon, Roy G.
Pub. info.: Multilayers : synthesis, properties, and non-electronic applications : symposium held December 2-4, 1987, Boston, Massachusetts, U.S.A..  pp.127-132,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 103