1.

Conference Proceedings
Conference Proceedings
1. Nano-Mechanical Properties of SiLK Low-K Dielectric Material
Gonzalez, J.C. ; Silva, M.I.N. ; Kuhn, L. ; Griffis, D. ; Russell, P.E.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.351-358,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
2.

Conference Proceedings
Conference Proceedings
2. Improvements in Focused Ion Beam Micro-machining of Interconnect Materials
Gonzalez, J.C. ; Silva, M.I.N. ; Griffis, D.P. ; Miau, T.T. ; Russell, P.E.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.404-411,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8