1.

Conference Proceedings
Conference Proceedings
1. Pulsed-Laser deposition of AIN thin films
Lu,Y.F. ; Ren,Z.M. ; Ni,H.Q. ; Goh,Y.W. ; Cheong,B.A. ; Chow,S.K. ; Wang,J.P. ; Chong,T.C.
Pub. info.: Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA.  pp.182-189,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3933
2.

Conference Proceedings
Conference Proceedings
2. Influence of laser fluence and laser repetition rate on the synthesis of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition
Goh,Y.W. ; Lu,Y.F. ; Ren,Z.M. ; Chong,T.C.
Pub. info.: Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore.  pp.241-244,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4426