1.

Conference Proceedings
Conference Proceedings
1. Detection of semiconductor defects using a novel fractal encoding algorithm
Gleason, S.S. ; Ferrell, R.K. ; Karnowski, T.P. ; Tobin, K.W., Jr.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.61-71,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. An Integrated Spatial Signature Analysis and Automatic Defect Classification System
Gleason, S.S. ; Tobin, K.W. ; Karnowski, T.P.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.204-211,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12
3.

Technical Paper
Technical Paper
3. Fuzzy Logic Connectivity in Semiconductor Defect Clustering
Karnowski, T.P. ; Gleason, S.S. ; Tobin, K.W., Jr.
Pub. info.: SME technical paper.  2001.  Society of Manufacturing Engineers