1.

Conference Proceedings
Conference Proceedings
1. Silicon mirror arrays fabricated by using bulk and surface micromachining
Gessner,T. ; Dotzel,W. ; Billep,D. ; Hahn,R. ; Kaufmann,C. ; Kehr,K. ; Kurth,S. ; Steiniger,C. ; Wollmann,U.
Pub. info.: Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California.  pp.296-305,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3008
2.

Conference Proceedings
Conference Proceedings
2. Micromirrors and micromirror arrays for scanning applicatoins
Gessner,T. ; Kurth,S. ; Kaufmann,C. ; Markert,J. ; Ehrlich,A. ; Dotzel,W.
Pub. info.: MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA.  pp.338-347,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4178
3.

Conference Proceedings
Conference Proceedings
3. Metal Disilicide Centacts to 6H-SiC
Kliz,J. ; Schoiz,T. ; Gottfried,K. ; Leibeit,J. ; Kaufmann,C. ; Gessner,T.
Pub. info.: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part2  pp.775-778,  1998.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 264-268
4.

Conference Proceedings
Conference Proceedings
4. A High Temperature Stable Metallization Scheme for SiC-Technolegy Operating at 400｡？in Air
Gottfried,K. ; Fritsche,H. ; Kriz,J. ; Leibclt,J. ; Kaufmann,C. ; Rudolf,F. ; Gessner,T.
Pub. info.: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part2  pp.795-798,  1998.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 264-268
5.

Conference Proceedings
Conference Proceedings
5. Analogously working micromirror arrays
Kehr,K. ; Kurth,S. ; Mehner,J. ; Kaufmann,C. ; Hahn,R. ; Dotzel,W. ; Gessner,T.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.80-89,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878
6.

Conference Proceedings
Conference Proceedings
6. Low-temperature approaches for fabrication of high-frequency microscanners
Hiller,K. ; Hahn,R. ; Kaufmann,C. ; Kurth,S. ; Kehr,K. ; Gessner,T. ; Dotzel,W. ; Wiemer,M. ; Schubert,I.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.58-66,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878